DocumentCode
2498511
Title
Double doping: A method to decrease dislocation densities in LEC InP crystals
Author
Dedavid, B.A. ; Fornari, R. ; Moriglioni, M. ; Kumar, J. ; Anbukumar, S. ; Taddia, M. ; Battagliarin, M. ; Sentimenti, E.
Author_Institution
MASPEC-CNR Inst., Parma, Italy
fYear
1993
fDate
19-22 Apr 1993
Firstpage
644
Lastpage
647
Abstract
The authors report on the growth of low-dislocation density low-carrier concentration p-type InP via codoping with CdTe. Four crystals were grown by the liquid encapsulated Czochralski (LEC) technique. The results of electrical and analytical studies suggest that both cadmium and tellurium undergo some chemical reactions before pulling, so that only a minor fraction of the added impurities is available for doping. The effectiveness of this codoping in terms of dislocation density reduction has been confirmed by the structural investigations carried out on the four crystals with low free carrier concentrations. The role of multiple doping as a strategy for dislocation reduction is discussed
Keywords
III-V semiconductors; cadmium compounds; carrier density; crystal growth from melt; dislocation density; indium compounds; semiconductor doping; semiconductor growth; InP:CdTe; LEC InP crystals; LEC technique; chemical reactions; codoping; dislocation densities; double doping; growth; impurities; liquid encapsulated Czochralski; low-carrier concentration; low-dislocation density; multiple doping; p-type InP; structural investigations; Atomic measurements; Chemicals; Crystalline materials; Crystals; Doping; Etching; Furnaces; Indium phosphide; Mass spectroscopy; Tellurium;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location
Paris
Print_ISBN
0-7803-0993-6
Type
conf
DOI
10.1109/ICIPRM.1993.380612
Filename
380612
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