Title :
Electrical properties of SCT thin films prepared by RF magnetron sputtering
Author :
Kim, J.S. ; Jung, I.H. ; Kim, C.H. ; Park, Y.P. ; Lee, J.U.
Author_Institution :
Dept. of Electr. Eng., Kwangwoon Univ., Seoul, South Korea
Abstract :
The (Sr0.85Ca0.15)TiO3 (SCT) thin films are deposited on Pt-coated electrodes (Pt/TiN/SiO2/Si) using RF magnetron sputtering at various substrate temperatures. The structural and electrical properties of SCT thin films are influenced by substrate temperature and annealing temperature, respectively. The maximum dielectric constant of thin films is obtained by annealing at 600°C. The dielectric constant changes almost linearly in temperature ranges of -80~+90°C. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 100 kHz. The dielectric constant changes almost linearly in bias voltage ranges of -5~+5 V
Keywords :
annealing; calcium compounds; dielectric losses; dielectric thin films; permittivity; sputter deposition; strontium compounds; (Sr0.85Ca0.15)TiO3; Pt-TiN-SiO2-Si; Pt-coated electrodes; RF magnetron sputtering; annealing temperature; dielectric constant; dielectric loss; substrate temperature; thin films; Annealing; Dielectric constant; Dielectric losses; Dielectric substrates; Dielectric thin films; Magnetic properties; Radio frequency; Sputtering; Temperature; Transistors;
Conference_Titel :
Electrical Insulating Materials, 1998. Proceedings of 1998 International Symposium on
Conference_Location :
Toyohashi
Print_ISBN :
4-88686-050-8
DOI :
10.1109/ISEIM.1998.741706
