Commercialized CMOS Compatible Micro Anemometer

In this paper, two different post CMOS fabrication process designs which were also novel differential hot wire anemometers (usually named it as flow sensors) similar to Honeywell flow sensor structure are presented. Additionally, other two new types of anemometer structure compatible with standard CMOS process were also demonstrated in this paper. Our fabrication strategy to the anemometer was based on 0.35 mum standard CMOS processes and fabricated this anemometer with IC integration, low cost less time to market and high performance characteristics. A successful post CMOS processes designed to fabricate these micro anemometer had been demonstrated. Besides, the characteristics of the anemometer which indicates a good linearity output in the flow measuring range from 0 to 12 Liter / min and a sensitivity of this micro anemometer near 1^{cm 3 / min} was measured.