DocumentCode :
2498945
Title :
MEMS Accelerometer with Screen Printed Piezoelectric Thick Film
Author :
Hindrichsen, C.C. ; Thomsen, E.V. ; Lou-Moller, R. ; Bove, T.
Author_Institution :
Tech. Univ. of Denmark, Lyngby
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
1477
Lastpage :
1480
Abstract :
A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTi1-x)O3 (PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600times3600times500 mum3) and a total chip size of 10times10 mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.
Keywords :
accelerometers; lead compounds; micromechanical devices; piezoelectric devices; thick films; MEMS accelerometer; PZT; beam structure; bulk-micromachined accelerometer; central seismic mass; frequency 17.5 kHz; piezoelectric accelerometer; piezoelectric thick film; screen printed thick film; Acceleration; Accelerometers; Design optimization; Electrodes; Micromechanical devices; Particle beams; Resonance; Resonant frequency; Silicon; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
ISSN :
1930-0395
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.355913
Filename :
4178908
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2498945
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