• DocumentCode
    2498945
  • Title

    MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

  • Author

    Hindrichsen, C.C. ; Thomsen, E.V. ; Lou-Moller, R. ; Bove, T.

  • Author_Institution
    Tech. Univ. of Denmark, Lyngby
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    1477
  • Lastpage
    1480
  • Abstract
    A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTi1-x)O3 (PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600times3600times500 mum3) and a total chip size of 10times10 mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.
  • Keywords
    accelerometers; lead compounds; micromechanical devices; piezoelectric devices; thick films; MEMS accelerometer; PZT; beam structure; bulk-micromachined accelerometer; central seismic mass; frequency 17.5 kHz; piezoelectric accelerometer; piezoelectric thick film; screen printed thick film; Acceleration; Accelerometers; Design optimization; Electrodes; Micromechanical devices; Particle beams; Resonance; Resonant frequency; Silicon; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2006. 5th IEEE Conference on
  • Conference_Location
    Daegu
  • ISSN
    1930-0395
  • Print_ISBN
    1-4244-0375-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2007.355913
  • Filename
    4178908
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2498945