Integrated Optical Sensor Platform based on Evanescent Field Coupling for Biochemical Sensor Applications

Author

Pang, Hyungseok ; LiKamWa, Patrick ; Cho, Hyoung J.

Author_Institution

Central Florida Univ., Orlando

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

1489

Lastpage

1492

Abstract

A photodetector integrated waveguide platform for diverse types of evanescent-wave sensor applications has been developed. Using this platform, surface plasmon resonance (SPR) detection has been demonstrated. The waveguide was made of SU-8 polymer as a guiding layer and siliconoxynitride (SiO_XN_y) as a cladding layer. The metal-semiconductor-metal (MSM) type photodetector coupled to the waveguide provides flexibility in design and fabrication compared to a pin (p-intrinsic-n) photodetector. We present a universal sensor architecture that can be used for evanescent-field based interrogation with (a) controllable refractive index and (b) integrated opto-electric signal conversion.

Keywords

chemical sensors; integrated optics; integrated optoelectronics; optical sensors; photodetectors; refractive index; surface plasmon resonance; SU-8 polymer; biochemical sensor; cladding layer; evanescent field coupling; evanescent-field based interrogation; evanescent-wave sensors; guiding layer; integrated optical sensor platform; integrated opto-electric signal conversion; metal-semiconductor-metal type photodetector; optical microsensor platform; photodetector integrated waveguide platform; pin photodetector; refractive index; siliconoxynitride; surface plasmon resonance detection; universal sensor; Biosensors; Optical coupling; Optical device fabrication; Optical sensors; Optical surface waves; Optical waveguides; Photodetectors; Plasmons; Polymers; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2006. 5th IEEE Conference on

Conference_Location

Daegu

ISSN

1930-0395

Print_ISBN

1-4244-0375-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.355916

Filename

4178911