DocumentCode
2499242
Title
Design and analysis of high resonant frequency (1 MHz) MEMS accelerometer
Author
Singh, Prashant ; Gupta, Puneet ; Srivastava, Prashant ; Goswami, Mausumi ; Singh, B. Raja
Author_Institution
Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India
fYear
2013
fDate
12-14 April 2013
Firstpage
1
Lastpage
5
Abstract
The present paper deals with the design of single axis folded beam electro-statically actuated comb-drive based accelerometer for high resonant frequency range (1 MHz) application. The accelerometer design and analysis is carried out in accordance with standard SOI single mask technology using MEMS Pro v5.1 simulation tool.
Keywords
accelerometers; capacitive sensors; microsensors; silicon-on-insulator; MEMS Pro v5.1 simulation tool; MEMS accelerometer; SOI single mask technology; electro-statically actuated comb-drive; frequency 1 MHz; high resonant frequency; single axis folded beam; Accelerometers; Capacitance; Micromechanical devices; Resonant frequency; Robot sensing systems; Thumb; Accelerometer; MEMS; capacitive sensing; folded beam; single axis;
fLanguage
English
Publisher
ieee
Conference_Titel
Engineering and Systems (SCES), 2013 Students Conference on
Conference_Location
Allahabad
Print_ISBN
978-1-4673-5628-2
Type
conf
DOI
10.1109/SCES.2013.6547581
Filename
6547581
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