Design and Development of Microcantilever Based Detector

Micro cantilever have got potential applications in every field of science ranging from physical and chemical sensing to biological disease diagnosis. The sensing action essentially is the deflection of the cantilever beam. The deflection depends upon the physical parameters of the cantilever such as width, length and thickness and it also strongly depends upon the material used. Device design and computational analysis for micro cantilever are addressed in detail in this paper. During the analysis and design it is important to consider readout method to be used for the detection. Measurement of nanometer range displacement in micro cantilever devices is challenging task. We have introduced new readout method and analysis is done for this method. The readout method will influence the design parameters for optimum readings. Three case studies have been considered for the analysis are temperature sensor, accelerometer and biosensor based on this readout method. Finally the micro cantilevers were fabricated and tested to verify the functionality of the proposed device.