DocumentCode
2499837
Title
Modulations in alternated tensile/compressive strained GaInAsP multilayer grown by gas source molecular beam epitaxy
Author
Ponchet, A. ; Rocher, A. ; Emery, J.Y. ; Starck, C. ; Goldstein, L.
Author_Institution
CEMES-LOE/CNRS, Toulouse, France
fYear
1993
fDate
19-22 Apr 1993
Firstpage
183
Lastpage
186
Abstract
Zero-net strained GaInAsP multiple quantum wells grown by gas source molecular beam epitaxy exhibit altered structural and optical properties when tensile barriers are introduced instead of lattice matched ones. Transmission electron microscopy observations have revealed that a modulation of thickness, strain, and probably chemical composition within the layers are responsible for this degradation. The modulation is strongly anisotropic with a period of 50 nm along the [110] direction. Although it is not yet entirely clear, the comparison with relaxed systems and with elastic relaxation models permits a conclusion that this mechanism is induced by a partial relaxation of strain. The amplification of the modulation as well as the opposite behavior between tensile and compressive layers are explained in this manner
Keywords
III-V semiconductors; chemical beam epitaxial growth; compressibility; deformation; gallium arsenide; indium compounds; optical properties; semiconductor growth; semiconductor quantum wells; stoichiometry; transmission electron microscopy; GaInAsP; TEM; compressive layers; degradation; elastic relaxation models; gas source molecular beam epitaxy; modulation amplification; multiple quantum wells; optical properties; strain relaxation; structure; tensile barriers; Anisotropic magnetoresistance; Capacitive sensors; Chemicals; Degradation; Electron optics; Geometrical optics; Lattices; Molecular beam epitaxial growth; Optical modulation; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location
Paris
Print_ISBN
0-7803-0993-6
Type
conf
DOI
10.1109/ICIPRM.1993.380679
Filename
380679
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