• DocumentCode
    2499955
  • Title

    Electrical and optical characterization of n-GaAs grown by MOCVD on semi-insulating InP and application to defect studies on MESFETs devices

  • Author

    Ben Hamida, A. ; Bremond, G. ; Perez, M. A Garcia ; Guillot, G. ; Azoulay, R. ; Chertouk, M. ; Clei, A.

  • Author_Institution
    URA CNRS, INSA de Lyon, Villeurbanne, France
  • fYear
    1993
  • fDate
    19-22 Apr 1993
  • Firstpage
    159
  • Lastpage
    162
  • Abstract
    The lattice-mismatch of 4% between GaAs and InP does not preclude device fabrication, although the characterization of such materials has shown the existence of a high density of dislocations at the heterointerface and a residual biaxial tensile strain due to the difference between the thermoelastic properties of the two materials. These growth difficulties are very detrimental for device applications and mainly for minority carrier based ones since they kill their lifetime. A compensation phenomenon on GaAs/InP samples is observed compared to GaAs homoepitaxial layers. The authors performed deep level transient spectroscopy (DLTS) and photoluminescence (PL) experiments on GaAs/InP layers and MESFET devices. This work showed no direct evidence of the impact of the electrically active lattice mismatch induced defects on the compensation phenomenon in GaAs/InP epilayers. On the contrary, PL results revealed that the compensation mechanism could be interpreted as related to Si moving from a Ga donor site to form a complex defect associating Si and As or Ga vacancies
  • Keywords
    CVD coatings; III-V semiconductors; Schottky gate field effect transistors; deep level transient spectroscopy; deformation; dislocation density; gallium arsenide; impurity states; indium compounds; photoluminescence; thermoelasticity; vacancies (crystal); GaAs-InP; InP; MESFET; compensation phenomenon; deep level transient spectroscopy; dislocation density; donor site; homoepitaxial layers; lattice-mismatch; minority carrier; photoluminescence; tensile strain; thermoelastic properties; vacancies; Gallium arsenide; Indium phosphide; MESFETs; MOCVD; Optical device fabrication; Optical materials; Photoluminescence; Spectroscopy; Tensile strain; Thermoelasticity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
  • Conference_Location
    Paris
  • Print_ISBN
    0-7803-0993-6
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1993.380685
  • Filename
    380685