DocumentCode :
2500620
Title :
DC Plasma Anodization of Quartz Resonators
Author :
Shanley, C.W. ; Dworsky, L.N.
fYear :
1982
fDate :
2-4 June 1982
Firstpage :
108
Lastpage :
114
Keywords :
Aging; Aluminum; Cathodes; Electrodes; Frequency measurement; Plasma materials processing; Plasma measurements; Plasma temperature; Protection; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
36th Annual Symposium on Frequency Control. 1982
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1982.200559
Filename :
1537499
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2500620
بازگشت