DocumentCode
2500620
Title
DC Plasma Anodization of Quartz Resonators
Author
Shanley, C.W. ; Dworsky, L.N.
fYear
1982
fDate
2-4 June 1982
Firstpage
108
Lastpage
114
Keywords
Aging; Aluminum; Cathodes; Electrodes; Frequency measurement; Plasma materials processing; Plasma measurements; Plasma temperature; Protection; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
36th Annual Symposium on Frequency Control. 1982
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1982.200559
Filename
1537499
Link To Document