Title :
Microfabrication and Metal Plating Technologies on Polytetrafluoroethylene Film Surface Treated by Atmospheric-Pressure Nonthermal-Plasma Graft Polymerization Process
Author :
Kuroki, Tomoyuki ; Tahara, Mitsuru ; Kuwahara, Takuya ; Okubo, Masaaki
Author_Institution :
Dept. of Mech. Eng., Osaka Prefecture Univ., Sakai, Japan
Abstract :
Microfabrication by photolithography and nickel plating of fluoropolymer film, exposed to atmospheric-pressure nonthermal-plasma (NTP) graft polymerization, are investigated. Electroless nickel plating on the NTP-graft-polymerizationtreated polytetrafluoroethylene (PTFE) film is successfully achieved. Highly adhesive nickel plating is obtained by reverse bend test. Furthermore, photolithographic patterns are formed on the plated PTFE film. This process is expected to be applied to flexible printed substrates and millimeter-wave antenna.
Keywords :
electroless deposition; microfabrication; millimetre wave antennas; photolithography; polymer blends; polymer films; polymerisation; atmospheric pressure nonthermal plasma graft polymerization process; electroless nickel plating; flexible printed substrates; fluoropolymer film; metal plating technologies; microfabrication; millimeter wave antenna; photolithography; plated PTFE film; polytetrafluoroethylene film surface; reverse bend test; Lithography; Microfabrication; Nickel; Plasmas; Polymers; Surface morphology; Surface treatment; Fluoropolymer films; graft polymerization; metal plating; microfabrication; nonthermal plasma (NTP); surface treatment;
Journal_Title :
Industry Applications, IEEE Transactions on
DOI :
10.1109/TIA.2013.2271742
