Microfabrication and Metal Plating Technologies on Polytetrafluoroethylene Film Surface Treated by Atmospheric-Pressure Nonthermal-Plasma Graft Polymerization Process

Author

Kuroki, Tomoyuki ; Tahara, Mitsuru ; Kuwahara, Takuya ; Okubo, Masaaki

Author_Institution

Dept. of Mech. Eng., Osaka Prefecture Univ., Sakai, Japan

Volume

50

Issue

1

fYear

2014

fDate

Jan.-Feb. 2014

Firstpage

45

Lastpage

50

Abstract

Microfabrication by photolithography and nickel plating of fluoropolymer film, exposed to atmospheric-pressure nonthermal-plasma (NTP) graft polymerization, are investigated. Electroless nickel plating on the NTP-graft-polymerizationtreated polytetrafluoroethylene (PTFE) film is successfully achieved. Highly adhesive nickel plating is obtained by reverse bend test. Furthermore, photolithographic patterns are formed on the plated PTFE film. This process is expected to be applied to flexible printed substrates and millimeter-wave antenna.

Keywords

electroless deposition; microfabrication; millimetre wave antennas; photolithography; polymer blends; polymer films; polymerisation; atmospheric pressure nonthermal plasma graft polymerization process; electroless nickel plating; flexible printed substrates; fluoropolymer film; metal plating technologies; microfabrication; millimeter wave antenna; photolithography; plated PTFE film; polytetrafluoroethylene film surface; reverse bend test; Lithography; Microfabrication; Nickel; Plasmas; Polymers; Surface morphology; Surface treatment; Fluoropolymer films; graft polymerization; metal plating; microfabrication; nonthermal plasma (NTP); surface treatment;

fLanguage

English

Journal_Title

Industry Applications, IEEE Transactions on

Publisher

ieee

ISSN

0093-9994

Type

jour

DOI

10.1109/TIA.2013.2271742

Filename

6553268