DocumentCode :
2502342
Title :
Sputtered C-Axis Inclined Piezoelectric Films and Shear Wave Resonators
Author :
Wang, J.S. ; Lakin, K.M. ; Landin, A.R.
fYear :
1983
fDate :
1-3 June 1983
Firstpage :
144
Lastpage :
150
Keywords :
Acoustic waves; Biomembranes; Crystallization; Piezoelectric films; Plasma temperature; Resonant frequency; Scanning electron microscopy; Substrates; Surface waves; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
37th Annual Symposium on Frequency Control. 1983
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1983.200658
Filename :
1537598
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2502342
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