Title :
An Analysis of Thickness-Extensional Trapped Energy Resonators with Rectangular Electrodes in the Zinc-Oxide Thin Film on Silicon Configuration
Author :
Tiersten, H.F. ; Stevens, D.S.
Keywords :
Differential equations; Dispersion; Electrodes; Etching; Performance analysis; Piezoelectric films; Resonance; Resonant frequency; Semiconductor thin films; Silicon;
Conference_Titel :
37th Annual Symposium on Frequency Control. 1983
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1983.200688
