Micromechanical logic

Summary form only given. Micromechanical digital logic elements based on electrostatic actuation have been fabricated using silicon micromachining technology. A complete logic family has been fabricated, including NOT, AND, NAND, OR, and NOR gates. Although the performance of the fabricated elements is far inferior to that of conventional microelectronic devices, the realization of micromechanical digital logic represents an application in the field of microdynamics and suggests an alternate approach to the implementation of low-speed, low-density, radiation-hard logic and memory.<>