Design and Fabrication of Micromixer With Piezoceramic Buzzer

Author

Chang, Yaw-Jen ; Chang, Yeon-Pun ; Huang, Ching-Wei

Author_Institution

Dept. of Mech. Eng., Chung Yuan Christian Univ., Chungli, Taiwan

fYear

2009

fDate

11-13 June 2009

Firstpage

1

Lastpage

3

Abstract

Micromixer is an important bioMEMS device for mixing samples. In this study, we developed a novel active micromixer using SU-8 to form the microstructure and piezoceramic buzzer to produce the agitation. This device consists of a mixing chamber, inlets and an outlet. It is tolerant of gas bubbles so that the priming process can be achieved. Under the agitation of piezoceramic buzzer, the samples can be well mixed. The advantages of this proposed micromixer include: (1) simple fabrication process; (2) low cost; (3) disposable; and (4) mass-production available.

Keywords

bioMEMS; microfabrication; mixing; piezoceramics; piezoelectric devices; SU-8; agitation; bioMEMS device; fabrication process; gas bubbles; micromixer design; mixing chamber; piezoceramic buzzer; priming process; Acoustic waves; Ceramics; Costs; Fabrication; Microchannel; Microfluidics; Microstructure; Piezoelectric actuators; Piezoelectric materials; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Bioinformatics and Biomedical Engineering , 2009. ICBBE 2009. 3rd International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2901-1

Electronic_ISBN

978-1-4244-2902-8

Type

conf

DOI

10.1109/ICBBE.2009.5162586

Filename

5162586