DocumentCode :
2503386
Title :
Micro fabrication of poly L lacid and its application
Author :
Koike, Yoshikazu ; Takeuchi, Hitoshi ; Hagiwara, Hiroki ; Ogura, Tomoki ; Aoki, Daichi ; Kumagai, Ken ; Ishikawa, Taku ; Nishikawa, Hiroyuki
Author_Institution :
Fac. of Eng., Shibaura Inst. of Tech., Tokyo, Japan
fYear :
2012
fDate :
2-5 Oct. 2012
Firstpage :
60
Lastpage :
61
Abstract :
Poly L lactic acid (PLLA) is attracted a great deal of attention. Because PLLA is a plant-derived plastic and is a bio-compatible one. And also, PLLA has piezoelectricity. Therefore, it is expected that the use of PLLA reduces environmental load in piezoelectric sensors and actuators for consumer applications. For sensor and actuator applications, Micro Electro Mechanical Systems (MEMS) technologies are important. In the fabrication of MEMS by PLLA, ion beam irradiation is consider to be a valuable tool for maskless patterning of high-aspect-ratio structures in the micro- and nanoscale. Proton Beam Writing (PBW) is also expected to apply for the micro fabrication process. In this report, PBW is applied for the micro fabrication of PLLA (poly L lactic acid) polymers which is piezoelectric polymers, plant derivative and has bio-adaptability. PLLA bulk and film are irradiated with 1MeV proton beam (PB). After beam irradiation, the samples are developed by ammonia liquid as the developing solution. As a result, the micro line of 3μm in width and 20μm in depth is fabricated successfully. Finally, the basic piezoelectric polymer actuator is fabricated.
Keywords :
ammonia; microactuators; microfabrication; microsensors; piezoelectric actuators; polymers; MEMS fabrication; MEMS technology; PLLA polymer; ammonia liquid; bio-compatible plastic; environmental load; ion beam irradiation; maskless patterning; microelectromechanical system; microfabrication; piezoelectric polymer actuator; piezoelectric sensor; piezoelectricity; plant-derived plastic; poly L lactic acid; proton beam writing; Actuators; Fabrication; Films; Particle beams; Piezoelectricity; Plastics; Vibrations; micro actuator; piezoelectric actuator; poly L lacid; polymerpiezo-electricity; proton beam writing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Consumer Electronics (GCCE), 2012 IEEE 1st Global Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-1500-5
Type :
conf
DOI :
10.1109/GCCE.2012.6379929
Filename :
6379929
Link To Document :
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