Title :
Etch Figures and Etch Rates in AT, BT, X and Y Cut Quartz Plates
fDate :
May 29 1984-June 1 1984
Keywords :
Crystallography; Etching; Isothermal processes; Numerical analysis; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface texture; Surface topography; Temperature;
Conference_Titel :
38th Annual Symposium on Frequency Control. 1984
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1984.200744
