DocumentCode :
2504598
Title :
Bias Controlled Frequency Trimming of SAW Devices in a DC O2Plasma
Author :
Day, John ; Jackson, Gordon ; Parker, Thomas E.
fYear :
1984
fDate :
May 29 1984-June 1 1984
Firstpage :
310
Lastpage :
314
Keywords :
Aluminum oxide; Equations; Etching; Frequency; Gold; Plasma applications; Plasma devices; Surface acoustic wave devices; Surface acoustic waves; Virtual reality;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
38th Annual Symposium on Frequency Control. 1984
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1984.200773
Filename :
1537713
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2504598
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