• DocumentCode
    2504598
  • Title

    Bias Controlled Frequency Trimming of SAW Devices in a DC O2Plasma

  • Author

    Day, John ; Jackson, Gordon ; Parker, Thomas E.

  • fYear
    1984
  • fDate
    May 29 1984-June 1 1984
  • Firstpage
    310
  • Lastpage
    314
  • Keywords
    Aluminum oxide; Equations; Etching; Frequency; Gold; Plasma applications; Plasma devices; Surface acoustic wave devices; Surface acoustic waves; Virtual reality;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    38th Annual Symposium on Frequency Control. 1984
  • Conference_Location
    Philadelphia, Pennsylvania, USA
  • Type

    conf

  • DOI
    10.1109/FREQ.1984.200773
  • Filename
    1537713
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2504598