DocumentCode
2505256
Title
Laser processing of solder resist layers on laminated substrates
Author
Berényi, Richárd
Author_Institution
Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ., Hungary
fYear
2003
fDate
8-11 May 2003
Firstpage
313
Lastpage
316
Abstract
The microelectronics industry is moving toward smaller feature sizes. The main driving forces are to improve performance and to lower cost. From the point of view of performance, the small distances between chips together with the short interconnection routes have of great importance in order to achieve faster operation. The application of polymers for the insulating and protective layers of interconnect substrates is beneficial to the performance and to the cost of a circuit module as well. In the article, the application of advanced laser technology for pattern and via generation has become an efficient tool for the fabrication of very high density interconnects substrates.
Keywords
integrated circuit interconnections; laser materials processing; polymers; protective coatings; resists; substrates; advanced laser technology; insulating layers; interconnect substrates; laminated substrates; laser processing; microelectronics industry; pattern generation; polymers; protective layers; solder resist layers; via generation; Copper; Integrated circuit interconnections; Laser ablation; Laser beam cutting; Laser beams; Optical materials; Optical microscopy; Power lasers; Resists; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN
0-7803-8002-9
Type
conf
DOI
10.1109/ISSE.2003.1260540
Filename
1260540
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