• DocumentCode
    2505256
  • Title

    Laser processing of solder resist layers on laminated substrates

  • Author

    Berényi, Richárd

  • Author_Institution
    Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ., Hungary
  • fYear
    2003
  • fDate
    8-11 May 2003
  • Firstpage
    313
  • Lastpage
    316
  • Abstract
    The microelectronics industry is moving toward smaller feature sizes. The main driving forces are to improve performance and to lower cost. From the point of view of performance, the small distances between chips together with the short interconnection routes have of great importance in order to achieve faster operation. The application of polymers for the insulating and protective layers of interconnect substrates is beneficial to the performance and to the cost of a circuit module as well. In the article, the application of advanced laser technology for pattern and via generation has become an efficient tool for the fabrication of very high density interconnects substrates.
  • Keywords
    integrated circuit interconnections; laser materials processing; polymers; protective coatings; resists; substrates; advanced laser technology; insulating layers; interconnect substrates; laminated substrates; laser processing; microelectronics industry; pattern generation; polymers; protective layers; solder resist layers; via generation; Copper; Integrated circuit interconnections; Laser ablation; Laser beam cutting; Laser beams; Optical materials; Optical microscopy; Power lasers; Resists; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
  • Print_ISBN
    0-7803-8002-9
  • Type

    conf

  • DOI
    10.1109/ISSE.2003.1260540
  • Filename
    1260540