Title :
Semiconductor gas sensors measuring system accuracy improvement with thermostimulated electrical conductance approach
Author :
Sobanski, T. ; Licznerski, Benedykt ; Szczurek, Andrzej
Author_Institution :
Fac. of Microsystem Electron. & Photonics, Wroclaw Univ. of Technol., Poland
Abstract :
Volatile organic compounds (VOCs) are a major group of air pollutants. They exist in the atmosphere as vapors. Because of the complexity of the VOC mixtures, sophisticated analytical methods are required to distinguish one compound from another. There is a great deal of interest in the development of relatively cheap and simple instruments for the continuous, in-situ and real time measurements. The semiconductor sensor systems provide a very interesting solution in this field of research. In this paper the attention was paid how to examine influence of measuring methods to analyze accuracy. Two different measuring methods were tested: simple response and thermostimulated electrical conductivity, their influence on precision of quantitative analyses were investigated. The results obtained with the thermostimulated electrical conductance measurements outperformed the traditional systems based on simple responses of thick film gas sensors matrices.
Keywords :
air pollution measurement; electrical conductivity measurement; gas sensors; VOC mixtures; air pollutants; measuring system accuracy; quantitative analysis; real time measurements; semiconductor gas sensors; simple response measurement; thermostimulated electrical conductance approach; thermostimulated electrical conductance measurements; thick film gas sensors; volatile organic compounds; Air pollution; Atmosphere; Atmospheric measurements; Conductivity measurement; Electric variables measurement; Gas detectors; Instruments; Pollution measurement; Sensor systems; Volatile organic compounds;
Conference_Titel :
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN :
0-7803-8002-9
DOI :
10.1109/ISSE.2003.1260559