Modeling the intrinsic inductance of embedded capacitors

Embedded capacitors are used in digital as well as RF devices. This paper shows that, in modeling such capacitors in the gigahertz frequency range, it is necessary to consider the inductances associated with the internal magnetic field distributions. Analytical formulas for the inductances in a two-terminal, circular, embedded capacitor are derived. The impedance from the capacitor model with the derived inductances is compared to that from a full wave field solver, and a very good agreement is observed up to a few GHz.