• DocumentCode
    2506154
  • Title

    Etching Study of AT-Cut Cultured Quartz Using Etchants Containing Fluoride Salts, Hydrofluoric Acid, and Ammonium Bifluorlde

  • Author

    Bernot, Anthony J.

  • fYear
    1985
  • fDate
    29-31 May 1985
  • Firstpage
    271
  • Lastpage
    275
  • Keywords
    Abrasives; Additives; Chemicals; Chemistry; Etching; Lapping; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    39th Annual Symposium on Frequency Control. 1985
  • Conference_Location
    Philadelphia, Pennsylvania, USA
  • Type

    conf

  • DOI
    10.1109/FREQ.1985.200856
  • Filename
    1537796