DocumentCode
2506154
Title
Etching Study of AT-Cut Cultured Quartz Using Etchants Containing Fluoride Salts, Hydrofluoric Acid, and Ammonium Bifluorlde
Author
Bernot, Anthony J.
fYear
1985
fDate
29-31 May 1985
Firstpage
271
Lastpage
275
Keywords
Abrasives; Additives; Chemicals; Chemistry; Etching; Lapping; Rough surfaces; Scanning electron microscopy; Surface roughness; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
39th Annual Symposium on Frequency Control. 1985
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1985.200856
Filename
1537796
Link To Document