DocumentCode
2506319
Title
Grain boundary barrier height and threshold voltage model of polycrystalline silicon thin film transistors
Author
He, Hongyu ; Zheng, Xueren
Author_Institution
Inst. of Microelectron., South China Univ. of Technol., Guangzhou, China
fYear
2010
fDate
10-11 May 2010
Firstpage
1
Lastpage
4
Abstract
Temperature effect of grain boundary barrier height is simulated considering double exponentials distribution trap states. Two threshold voltage definitions are compared, gate voltage when maximum barrier height occurs and when the condition of equal trapped and free charge interface. And grain size dependence of threshold voltage is also present and compared. Low electric field mobility is computed based on the barrier height model. The results show that barrier height is less dependent on temperature, and more dependent on the trap states density or grain size.
Keywords
electric fields; silicon; thin film transistors; S; double exponentials distribution trap states; electric field mobility; free charge interface; gate voltage; grain boundary barrier height; polycrystalline silicon thin film transistors; temperature effect; threshold voltage model; Doping; Electron mobility; Electron traps; Exponential distribution; Grain boundaries; Grain size; Semiconductor process modeling; Silicon; Thin film transistors; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Junction Technology (IWJT), 2010 International Workshop on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-5866-0
Type
conf
DOI
10.1109/IWJT.2010.5474902
Filename
5474902
Link To Document