• DocumentCode
    2506319
  • Title

    Grain boundary barrier height and threshold voltage model of polycrystalline silicon thin film transistors

  • Author

    He, Hongyu ; Zheng, Xueren

  • Author_Institution
    Inst. of Microelectron., South China Univ. of Technol., Guangzhou, China
  • fYear
    2010
  • fDate
    10-11 May 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Temperature effect of grain boundary barrier height is simulated considering double exponentials distribution trap states. Two threshold voltage definitions are compared, gate voltage when maximum barrier height occurs and when the condition of equal trapped and free charge interface. And grain size dependence of threshold voltage is also present and compared. Low electric field mobility is computed based on the barrier height model. The results show that barrier height is less dependent on temperature, and more dependent on the trap states density or grain size.
  • Keywords
    electric fields; silicon; thin film transistors; S; double exponentials distribution trap states; electric field mobility; free charge interface; gate voltage; grain boundary barrier height; polycrystalline silicon thin film transistors; temperature effect; threshold voltage model; Doping; Electron mobility; Electron traps; Exponential distribution; Grain boundaries; Grain size; Semiconductor process modeling; Silicon; Thin film transistors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Junction Technology (IWJT), 2010 International Workshop on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-5866-0
  • Type

    conf

  • DOI
    10.1109/IWJT.2010.5474902
  • Filename
    5474902