Title :
Recent Developments on Membrane Bulk-Acoustic-Wave Resonators
Author :
Wang, J.S. ; Kong, A. ; Lau, K.F. ; Yen, K.H.
Keywords :
Argon; Biomembranes; Fabrication; Frequency; Gases; Ion beams; Microelectronics; Sputter etching; Substrates; VHF circuits;
Conference_Titel :
39th Annual Symposium on Frequency Control. 1985
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1985.200869
