Title :
Curvature control of silicon microlens for THz dielectric antenna
Author :
Lee, Choonsup ; Chattopadhyay, Goutam ; Cooper, Ken ; Mehdi, Imran
Author_Institution :
NASA Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.
Keywords :
curvature measurement; dielectric-loaded antennas; elemental semiconductors; microfabrication; microlenses; optical fabrication; optical losses; optical materials; photoresists; silicon; terahertz waves; Si; THz dielectric antenna; curvature control; hemispherical silicon microlens; optical microfabrication; photoresist; reduce substrate mode losses; Antenna arrays; Arrays; Etching; Lenses; Microoptics; Resists; Silicon;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
DOI :
10.1109/IRMMW-THz.2012.6380111
