DocumentCode

2507571

Title

Experimental Study and Numerical Simulation of Quartz Crystal Etched Figures

Author

Tellier, C.R. ; Vialle, N. ; Vaterkowski, J.L.

fYear

1986

fDate

28-30 May 1986

Firstpage

76

Lastpage

85

Keywords

Chemicals; Diffusion processes; Equations; Etching; Hafnium; Lattices; Numerical models; Numerical simulation; Shape; Tellurium;

fLanguage

English

Publisher

ieee

Conference_Titel

40th Annual Symposium on Frequency Control. 1986

Conference_Location

Philadelphia, Pennsylvania, USA

Type

conf

DOI

10.1109/FREQ.1986.200925

Filename

1537865