Title :
Fabrication of TiNi shape memory alloy micro-structures and ceramic micro-mold by LIGA-MA-SPS process
Author :
Miyano, Naoki ; Iwasa, Hiroshi ; Matsumoto, Michito ; Kato, Fumiki ; Ameyama, Kei ; Sugiyama, Susumu
Author_Institution :
Dept. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan
Abstract :
Metals and ceramics are becoming increasing of importance to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In the study, we have developed a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using spark plasma sintering (SPS) machine. In addition, the alloys are made by mechanical alloying (MA) method using a combination of different metal powder. A micro spring structure of Ti-Ni-Cu shape memory alloy powder was produced by way of trial. Finally, it was found that the LIGA-MA-SPS process is an effective technique.
Keywords :
LIGA; copper alloys; crystal microstructure; mechanical alloying; micromechanical devices; nickel alloys; plasma materials processing; powder metallurgy; shape memory effects; sintering; titanium alloys; LIGA-MA-SPS process; Ti-Ni-Cu; Ti-Ni-Cu shape memory alloy powder; TiNi shape memory alloy micro-structures; ceramic micro-mold; deep-X ray lithography; electroforming; fabrication; mechanical alloying method; mechanical properties; metal powder; micro spring structure; microstructure; molding techniques; physical properties; reproduction; spark plasma sintering machine; Alloying; Ceramics; Fabrication; Mechanical factors; Microstructure; Plasma properties; Powders; Shape memory alloys; Sparks; Springs;
Conference_Titel :
Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on
Print_ISBN :
0-7803-7611-0
DOI :
10.1109/MHS.2002.1058011
