Title :
A new micro jerk sensor with viscous coupling
Author :
Fujiyoshi, Motohiro ; Nonomura, Yutaka ; Arai, Fumihito ; Fukuda, Toshio
Author_Institution :
Toyota Central R&D Labs. Inc., Aichi, Japan
Abstract :
We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.
Keywords :
acceleration measurement; microsensors; MEMS device; acceleration measurement; micro jerk sensor; two degrees-of-freedom model; vibrator; viscous coupling; Acceleration; Circuit noise; Control systems; Fires; Humans; Micromechanical devices; Research and development; Sensor systems; Springs; Viscosity;
Conference_Titel :
Micromechatronics and Human Science, 2002. MHS 2002. Proceedings of 2002 International Symposium on
Print_ISBN :
0-7803-7611-0
DOI :
10.1109/MHS.2002.1058038
