DocumentCode :
250881
Title :
Wide-range load sensor using quartz crystal resonator for biological signal detection
Author :
Murozaki, Yuichi ; Arai, Fumihito
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya, Japan
fYear :
2014
fDate :
May 31 2014-June 7 2014
Firstpage :
4405
Lastpage :
4410
Abstract :
A load sensor with high sensitivity, a wide measurement range, and a small size was developed by using an AT-cut quartz crystal resonator (QCR). The quartz crystal generates a charge that is proportional to the external force. Because it has high sensitivity and excellent temperature stability, it has been used for various sensors. In particular, a QCR has an inherently superior static-load-sensing characteristic. However, a QCR is fragile and easily broken by a stress concentration. Moreover, a retention mechanism is required to efficiently transmit the load, and it is necessary to fix the QCR firmly to avoid a horizontal force. Moreover, it is very difficult to miniaturize the retention mechanism because the fabrication and assembly process is complicated. We previously proposed a miniaturized sensor element that was developed using microfabrication. The QCR load sensor had an enormously wide force-sensing range of greater than 104 N. However, the output was easily affected by a change in the parasitic capacitance around the QCR. The objective of this study was to improve the load-measurement resolution and stabilize the sensor output for application to biological signal detection. We fabricated a QCR sensor with a sensitivity of 973 Hz/N and succeeded in detecting multiple biological signals (respiration, heartbeat, and posture) with using proposed QCR load sensor.
Keywords :
bioelectric potentials; crystal resonators; medical signal detection; sensors; QCR; biological signal detection; force-sensing range; heartbeat signals; load-measurement resolution; microfabrication; miniaturized sensor element; parasitic capacitance; posture signals; quartz crystal resonator; respiration signals; retention mechanism; static-load-sensing characteristic; stress concentration; temperature stability; wide-range load sensor; Crystals; Force; Oscillators; Robot sensing systems; Stress; Temperature measurement; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation (ICRA), 2014 IEEE International Conference on
Conference_Location :
Hong Kong
Type :
conf
DOI :
10.1109/ICRA.2014.6907501
Filename :
6907501
Link To Document :
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