DocumentCode

2509106

Title

Dual Stripe Sensor for in Contact Thermal Asperity Testing with Picosliders

Author

Gatzen, H.H. ; Schwabe, M.K.

Author_Institution

Inst. for Microtechnology

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

250

Lastpage

250

Keywords

Capacitance measurement; Particle measurements; Pollution measurement; Surface contamination; Testing; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

conf

DOI

10.1109/INTMAG.1998.742316

Filename

742316