Title :
Investigations of Fly Height Changes Due to Small Particles using Capacitance Measurements
Author :
Raman, Vasumathi ; Jen, David ; Dorius, L. ; Gillis, D.R. ; Feliss, B.A. ; Wolter, R.F.
Author_Institution :
IBM Corp.
Keywords :
Capacitance measurement; Particle measurements; Pollution measurement; Surface contamination;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.742318
