DocumentCode
2509262
Title
Nanomechanical Properties of CN/sub x/ Overcoats with Different Deposition Bias and Multiple-Layer Properties of DLC Films on Si
Author
Hsiao, Ruey-Chang ; Bogy, David B. ; Singh, Chaman
Author_Institution
University of California at Berkeley
fYear
1998
fDate
6-9 Jan. 1998
Firstpage
252
Lastpage
252
Keywords
Coatings; Composite materials; Fabrication; Lubricants; Magnetic films; Magnetic materials; Material storage; Protection; Semiconductor films; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-5118-5
Type
conf
DOI
10.1109/INTMAG.1998.742324
Filename
742324
Link To Document