DocumentCode
2509775
Title
Etch Channels in Single Crystal Cultured Quartz
Author
Johnson, Gary R. ; Irvine, Robert A.
fYear
1987
fDate
27-29 May 1987
Firstpage
175
Lastpage
182
Keywords
Capacitive sensors; Costs; Electronics industry; Electrons; Etching; Manufacturing processes; Optical microscopy; Optical resonators; Stress; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
41st Annual Symposium on Frequency Control. 1987
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1987.201020
Filename
1537960
Link To Document