Title :
On the control of scanning tunnelling microscopes
Author :
Banning, R. ; Sholte ; Holman, A.E.
Author_Institution :
Fac. of Appl. Phys., Delft Univ. of Technol., Netherlands
Abstract :
The scanning tunnelling microscope (STM) can be used either for qualitative microscopy or for lithography. Furthermore, this microscope is a high precision instrument sensitive to disturbances originating from sound waves, vibrations and temperature variations. The quality of mechanical design is paramount for the scanning tunnelling microscopy technology. It is however not only the quality of mechanical design which defines the STM´s operational reliability, it is also the quality of the STM´s control system, as practical experience indicates. In this paper, attention is focused on improving the STM´s control system
Keywords :
control systems; hierarchical systems; microscopy; nonlinear control systems; optimal control; scanning tunnelling microscopy; control system; hierarchical control; model based control; nonlinear control; optimal control; scanning tunnelling microscopes; Control systems; Hierarchical systems; Microscopy; Nonlinear systems; Optimal control;
Conference_Titel :
Control Applications, 1994., Proceedings of the Third IEEE Conference on
Conference_Location :
Glasgow
Print_ISBN :
0-7803-1872-2
DOI :
10.1109/CCA.1994.381298
