DocumentCode
2510204
Title
Terahertz near-field imaging of embedded metallic gratings
Author
Moon, Kiwon ; Do, Youngwoong ; Lim, Meehyun ; Han, Haewook
Author_Institution
Dept. of Electr. & Comput. Eng., POSTECH, Pohang, South Korea
fYear
2012
fDate
23-28 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
We present a THz scattering-type scanning near-field optical microscope (THz s-SNOM) system. To estimate pure material resolution of our THz s-SNOM system, near-field images were obtained for embedded metallic grating. The pure material resolution of our THz s-SNOM system was estimated to be less than 100 nm.
Keywords
diffraction gratings; near-field scanning optical microscopy; terahertz spectroscopy; terahertz wave imaging; embedded metallic grating; near field images; terahertz near field imaging; terahertz scattering type scanning near field optical microscope; Broadband antennas; Broadband communication; Gratings; Image resolution; Imaging; Materials; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location
Wollongong, NSW
ISSN
2162-2027
Print_ISBN
978-1-4673-1598-2
Electronic_ISBN
2162-2027
Type
conf
DOI
10.1109/IRMMW-THz.2012.6380249
Filename
6380249
Link To Document