DocumentCode :
2510204
Title :
Terahertz near-field imaging of embedded metallic gratings
Author :
Moon, Kiwon ; Do, Youngwoong ; Lim, Meehyun ; Han, Haewook
Author_Institution :
Dept. of Electr. & Comput. Eng., POSTECH, Pohang, South Korea
fYear :
2012
fDate :
23-28 Sept. 2012
Firstpage :
1
Lastpage :
2
Abstract :
We present a THz scattering-type scanning near-field optical microscope (THz s-SNOM) system. To estimate pure material resolution of our THz s-SNOM system, near-field images were obtained for embedded metallic grating. The pure material resolution of our THz s-SNOM system was estimated to be less than 100 nm.
Keywords :
diffraction gratings; near-field scanning optical microscopy; terahertz spectroscopy; terahertz wave imaging; embedded metallic grating; near field images; terahertz near field imaging; terahertz scattering type scanning near field optical microscope; Broadband antennas; Broadband communication; Gratings; Image resolution; Imaging; Materials; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
ISSN :
2162-2027
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
Type :
conf
DOI :
10.1109/IRMMW-THz.2012.6380249
Filename :
6380249
Link To Document :
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