DocumentCode :
2510374
Title :
Thin Film Resonator Technology
Author :
Lakin, K.M. ; Kline, G.R. ; Ketcham, R.S. ; Landin, A.R. ; Burkland, W.A. ; McCarron, K.T. ; Braymen, S.D. ; Burns, S.G.
fYear :
1987
fDate :
27-29 May 1987
Firstpage :
371
Lastpage :
381
Keywords :
Band pass filters; Frequency; Integrated circuit technology; Materials processing; Oscillators; Piezoelectric films; Semiconductor thin films; Substrates; Thin film devices; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
41st Annual Symposium on Frequency Control. 1987
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1987.201049
Filename :
1537989
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2510374