DocumentCode :
2510376
Title :
Fabrication of VOx microbolometer detector coupled with thin-film spiral antenna by metal-organic decomposition
Author :
Son, L.N. ; Tachiki, T. ; Uchida, T.
Author_Institution :
Nat. Defense Acad., Yokosuka, Japan
fYear :
2012
fDate :
23-28 Sept. 2012
Firstpage :
1
Lastpage :
2
Abstract :
A VOx microbolometer detector coupled with thin-film spiral antenna was fabricated by metal-organic decomposition. Temperature coefficient of resistance of the microbolometer was 4.7 %/K at 300 K and the responsivity was 120 V/W for 94 GHz electromagnetic wave radiation at a bias current of 0.5 mA.
Keywords :
bolometers; decomposition; spiral antennas; thin films; VOx; VOx microbolometer detector; current 0.5 mA; electromagnetic wave radiation bias; frequency 94 GHz; metal-organic decomposition; microbolometer resistance; temperature 300 K; temperature coefficient; thin film spiral antenna; Antennas; Bismuth; Bolometers; Detectors; Resistance; Spirals; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
ISSN :
2162-2027
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
Type :
conf
DOI :
10.1109/IRMMW-THz.2012.6380257
Filename :
6380257
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2510376
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