Magnetic variable reluctance mini-motor using Liga, x-ray lithography and electroplating
Author :
O´Sullivan, E.J. ; Cooper, E.I. ; Romankiw, Lubomyr T. ; Krongelb, S. ; Trouilloud, P. ; Hedge, S. ; Horkans, J. ; Kwietniak, K. ; Tornello, J. ; Roux, S. ; Wood, P. ; Malek, C.K. ; Ling, Zaixun
Author_Institution :
IBM Corp.
fYear :
1998
fDate :
6-9 Jan. 1998
Firstpage :
275
Lastpage :
275
Keywords :
Inductance; Magnetic films; Magnetic flux; Magnetostatic waves; Optical device fabrication; Optical films; Reluctance motors; Thin film inductors; Voltage; X-ray lithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
