Title :
Experiences with a pilot system for preparing multicrystalline silicon wafers
Author :
Helmreich, D. ; Knobel, R.M. ; Ermer, W.
Author_Institution :
Heliotronic GmbH, Burghausen, West Germany
Abstract :
An integrated pilot system for low-cost production of multicrystalline silicon wafers is presented. It is based on SILSO ingot casting and complemented by band-saw and multiblade-slurry sawing techniques. Individual processing steps and their intersections are defined and studied as an early step of optimization in order to find the most economical concept for a future production line. Experiences with such a pilot system are reported and discussed with respect to output, material, quality, yield, and mutual adjustment.
Keywords :
crystal growth from melt; elemental semiconductors; silicon; SILSO ingot casting; band-saw technique; multiblade-slurry sawing; multicrystalline Si wafers; quality; semiconductor; yield; Casting; Crystalline materials; Crystallization; Laboratories; Photovoltaic cells; Production; Production systems; Sawing; Sheet materials; Silicon; Slurries;
Conference_Titel :
Photovoltaic Specialists Conference, 1988., Conference Record of the Twentieth IEEE
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/PVSC.1988.105937
