DocumentCode
2511311
Title
Experiences with a pilot system for preparing multicrystalline silicon wafers
Author
Helmreich, D. ; Knobel, R.M. ; Ermer, W.
Author_Institution
Heliotronic GmbH, Burghausen, West Germany
fYear
1988
fDate
1988
Firstpage
1390
Abstract
An integrated pilot system for low-cost production of multicrystalline silicon wafers is presented. It is based on SILSO ingot casting and complemented by band-saw and multiblade-slurry sawing techniques. Individual processing steps and their intersections are defined and studied as an early step of optimization in order to find the most economical concept for a future production line. Experiences with such a pilot system are reported and discussed with respect to output, material, quality, yield, and mutual adjustment.
Keywords
crystal growth from melt; elemental semiconductors; silicon; SILSO ingot casting; band-saw technique; multiblade-slurry sawing; multicrystalline Si wafers; quality; semiconductor; yield; Casting; Crystalline materials; Crystallization; Laboratories; Photovoltaic cells; Production; Production systems; Sawing; Sheet materials; Silicon; Slurries;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 1988., Conference Record of the Twentieth IEEE
Conference_Location
Las Vegas, NV, USA
Type
conf
DOI
10.1109/PVSC.1988.105937
Filename
105937
Link To Document