Title :
Active Terahertz near-field probes for high-resolution free-carrier density imaging applications
Author :
Nagel, Michael ; Safiei, Ali ; Pletzer, Tobias ; Kurz, Heinrich
Author_Institution :
AMO GmbH, Aachen, Germany
Abstract :
First photo-conductive near-field probes combining THz generation, detection, transmission and resonant focusing element in a single micro-structured cantilever device are presented and applied to free-carrier density imaging applications in semiconductor (solar) material analytics.
Keywords :
cantilevers; photoconducting devices; probes; terahertz wave imaging; THz detection; THz generation; active terahertz near-field probes; high-resolution free-carrier density imaging applications; microstructured cantilever device; photo-conductive near-field probes; resonant focusing element; semiconductor solar material analytics; Imaging; Noise measurement; Probes; Resonant frequency; Semiconductor device measurement; Silicon; Transmission line measurements;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
DOI :
10.1109/IRMMW-THz.2012.6380311
