DocumentCode
2512378
Title
Terahertz confocal microscopy with a quantum cascade laser source
Author
De Cumis, R. U Siciliani ; Xu, J.-H. ; Masini, L. ; Innocenti, R. Degl ; Pingue, P. ; Benedetti, P.A. ; Tredicucci, A. ; Vitiello, M.S.
Author_Institution
Ist. Nanosci., NEST, Scuola Normale Super., Pisa, Italy
fYear
2012
fDate
23-28 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
We report the realization of a confocal THz microscope based on a ~ 3 THz quantum cascade laser source. A resolution as low as 67 μm is achieved, with a large contrast enhancement allowed by the confocal geometry. The capability of imaging overlayed objects on close-by planes is also demonstrated.
Keywords
optical microscopy; quantum cascade lasers; terahertz wave detectors; terahertz wave imaging; capability of imaging; close-by planes; confocal geometry; frequency 3 THz; large contrast enhancement; overlayed objects; quantum cascade laser source; resolution; terahertz confocal microscopy; wavelength 67 mum; Image resolution; Inspection; Lenses; Microscopy; Quantum cascade lasers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location
Wollongong, NSW
ISSN
2162-2027
Print_ISBN
978-1-4673-1598-2
Electronic_ISBN
2162-2027
Type
conf
DOI
10.1109/IRMMW-THz.2012.6380355
Filename
6380355
Link To Document