Title :
Terahertz confocal microscopy with a quantum cascade laser source
Author :
De Cumis, R. U Siciliani ; Xu, J.-H. ; Masini, L. ; Innocenti, R. Degl ; Pingue, P. ; Benedetti, P.A. ; Tredicucci, A. ; Vitiello, M.S.
Author_Institution :
Ist. Nanosci., NEST, Scuola Normale Super., Pisa, Italy
Abstract :
We report the realization of a confocal THz microscope based on a ~ 3 THz quantum cascade laser source. A resolution as low as 67 μm is achieved, with a large contrast enhancement allowed by the confocal geometry. The capability of imaging overlayed objects on close-by planes is also demonstrated.
Keywords :
optical microscopy; quantum cascade lasers; terahertz wave detectors; terahertz wave imaging; capability of imaging; close-by planes; confocal geometry; frequency 3 THz; large contrast enhancement; overlayed objects; quantum cascade laser source; resolution; terahertz confocal microscopy; wavelength 67 mum; Image resolution; Inspection; Lenses; Microscopy; Quantum cascade lasers; Silicon;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
DOI :
10.1109/IRMMW-THz.2012.6380355
