Device layer transferred poly-Si TFT array for high resolution liquid crystal projector

Author

Sumiyoshi, K. ; Sato, Y. ; Kaneko, S. ; Sakamoto, M. ; Imai, M. ; Kato, Y. ; Wada, S. ; Kohashi, H. ; Ashibe, M. ; Ohmachi, T. ; Kubota, K. ; Endo, N.

Author_Institution

NEC Corp., Kawasaki, Japan

fYear

1989

fDate

3-6 Dec. 1989

Firstpage

165

Lastpage

168

Abstract

An active-matrix liquid-crystal light valve (LCLV) for a high-resolution projector, using device layer transfer technology, is proposed. This LCLV will not require high-density interconnection between bus lines and Si IC drivers. To confirm the validity of this proposal, a high-performance poly-Si TFT (thin-film transistor) array with 480*768 pixels in 80 mm diagonal has been fabricated on an oxidized Si wafer. This TFT has a triple-gate structure for obtaining a high on/off current ratio and buried-isolated-pixel-electrode (BIP) structure and ITO barrier metal for reducing defects. This TFT array was transferred onto transparent glass substrate using device layer transfer technology, and the liquid-crystal projector was successfully realized.<>

Keywords

elemental semiconductors; liquid crystal displays; optical projectors; silicon; thin film transistors; 368640 pixels; 480 pixels; 768 pixels; ITO barrier metal; Si; Si-ITO; Si-InSnO; TFT array; active-matrix liquid-crystal light valve; buried-isolated-pixel-electrode; device layer transfer technology; high on/off current ratio; high resolution liquid crystal projector; oxidized wafer; transparent glass substrate; triple-gate structure; Active matrix liquid crystal displays; Active matrix technology; Electrodes; Glass; Integrated circuit interconnections; Liquid crystal devices; Liquid crystal displays; Proposals; Thin film transistors; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1989. IEDM '89. Technical Digest., International

Conference_Location

Washington, DC, USA

ISSN

0163-1918

Print_ISBN

0-7803-0817-4

Type

conf

DOI

10.1109/IEDM.1989.74252

Filename

74252