DocumentCode :
2513545
Title :
Fabrication and Application of Multi-Component Piezoelectric Thin Films
Author :
Sayer, M.
fYear :
1986
fDate :
8-11 June 1986
Firstpage :
560
Lastpage :
568
Keywords :
Acoustic waves; Atomic layer deposition; Ceramics; Fabrication; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Temperature; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location :
Bethlehem, PA, USA
Type :
conf
DOI :
10.1109/ISAF.1986.201206
Filename :
1538146
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2513545
