Title :
Properties of Lithium Niobate Thin Polycrystalline Films Deposited on Silicon Substrates
Author :
Cholapranee, T. ; Fabiny, L.
Keywords :
Aluminum; Lithium niobate; Powders; Semiconductor films; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature; X-ray diffraction;
Conference_Titel :
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location :
Bethlehem, PA, USA
DOI :
10.1109/ISAF.1986.201211
