Property of sub-process transition in short gap electrostatic discharge with electrode moving speed to target

Spark discharge can be described with Townsend theory or streamer discharge theory. Short-gap electrostatic discharge (ESD) is a special electric spark and related largely to gas pressure variation. Transition characteristics of two subprocesses, surface process and avalanche process, are considered in short gap ESD. Simulation results from numerical algorithm verified primarily theoretical description of electrode moving speed effect on discharge parameter in short gap ESD. Electrode large speed reduces the influence from avalanche process while enhances the action of surface process in the entire process of electrostatic discharge.