Use of discrete event simulation to analyze dispatch policies of an equipment group in semiconductor fab

We describe a methodology to model complex operation and process driven practices using a discrete event simulator. This level of detail in the model is critical for the analyses and design of complex operation and process driven dispatch policies in a semiconductor fab. The modeling of these practices is typically not a part of the general set of rules and methods provided by commercially available simulation software. The methodology provides key information that simplifies the development of suitable dispatch policies subject to factory dynamics. The modeling philosophy plays a key role in the success of simulation as a culture. As an example, we present the modeling of complex floor practices to analyze the impact of setup changes subject to process restrictions.