• DocumentCode
    2517053
  • Title

    Changing The Nature Of Change In Semiconductor Technology

  • Author

    Burger, Robert M.

  • Author_Institution
    Semiconductor Research Corporation
  • fYear
    1993
  • fDate
    22-24 Jun 1993
  • Firstpage
    1
  • Lastpage
    1
  • Keywords
    Electronics industry; Integrated circuit modeling; Job shop scheduling; Lithography; Manufacturing processes; Materials testing; Random access memory; Research and development; Transistors; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nonvolatile Memory Technology Review, 1993
  • Print_ISBN
    0-7803-1290-2
  • Type

    conf

  • DOI
    10.1109/NVMT.1993.696933
  • Filename
    696933