DocumentCode :
2517083
Title :
MNOS Memory Technology With Oxynitride Thin Films
Author :
Kapoor, Vik J.
Author_Institution :
University of Cincinnati
fYear :
1993
fDate :
22-24 Jun 1993
Firstpage :
3
Lastpage :
4
Keywords :
Chemicals; Conductive films; Dielectric thin films; Electron traps; Impurities; Nonvolatile memory; Optical films; Semiconductor films; Silicon; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nonvolatile Memory Technology Review, 1993
Print_ISBN :
0-7803-1290-2
Type :
conf
DOI :
10.1109/NVMT.1993.696935
Filename :
696935
Link To Document :
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