DocumentCode
2517083
Title
MNOS Memory Technology With Oxynitride Thin Films
Author
Kapoor, Vik J.
Author_Institution
University of Cincinnati
fYear
1993
fDate
22-24 Jun 1993
Firstpage
3
Lastpage
4
Keywords
Chemicals; Conductive films; Dielectric thin films; Electron traps; Impurities; Nonvolatile memory; Optical films; Semiconductor films; Silicon; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nonvolatile Memory Technology Review, 1993
Print_ISBN
0-7803-1290-2
Type
conf
DOI
10.1109/NVMT.1993.696935
Filename
696935
Link To Document