Title :
MNOS Memory Technology With Oxynitride Thin Films
Author_Institution :
University of Cincinnati
Keywords :
Chemicals; Conductive films; Dielectric thin films; Electron traps; Impurities; Nonvolatile memory; Optical films; Semiconductor films; Silicon; Transistors;
Conference_Titel :
Nonvolatile Memory Technology Review, 1993
Print_ISBN :
0-7803-1290-2
DOI :
10.1109/NVMT.1993.696935