Title :
MOEMS laser tuning element with an indirect drive
Author :
Syms, R.R.A. ; Lohmann, A. ; Huang, W.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll., London
Abstract :
A tuning element for a Littrow external cavity laser combining a vertically etched blazed grating and linear and rotary tuning actuators is demonstrated. Extended tuning is achieved using an indirect drive via a flexure
Keywords :
diffraction gratings; laser cavity resonators; laser tuning; micro-optics; microactuators; Littrow external cavity laser; MOEMS; indirect drive; laser tuning element; linear tuning actuator; optical MEMS; rotary tuning actuator; vertically etched blazed grating; Etching; Fingers; Gratings; Laser tuning; Micromechanical devices; Optical devices; Optical tuning; Pneumatic actuators; Prototypes; Semiconductor lasers;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540051
