Title :
Two-axis MEMS scanner for display and imaging applications
Author :
Urey, Hakan ; Yalcinkaya, Arda D. ; Montague, Tom ; Brown, Dean ; Sprague, Randy ; Anac, Ozan ; Ataman, Caglar ; Basdogan, Ipek
Author_Institution :
Electr. Eng. & Opt. Microsyst. Lab., Koc Univ., Istanbul
Abstract :
Two-axis gimbaled scanner used in an SVGA display product with 58deg optical scan angle, 1.5 mm mirror size, and 21 KHz resonant frequency is reported. Scanner is actuated electromagnetically using a single coil on the outer frame and by mechanical coupling of outer frame motion into the inner mirror frame
Keywords :
electromagnetic actuators; microdisplays; micromechanical devices; micromirrors; optical scanners; 1.5 mm; 21 KHz; SVGA display; electromagnetic actuator; gimbaled scanner; imaging application; mechanical coupling; mirror; optical scan angle; resonant frequency; two-axis MEMS scanner; Coils; Displays; Electromagnetic coupling; Laboratories; Magnetic field measurement; Micromechanical devices; Mirrors; Optical imaging; Resonance; Resonant frequency;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540054
